●Product description

Open Cassette is a carrier box used for moving lines and lines
during the wafer manufacturing process. Open Cassette is designed
as open structure to ensure ease of cleaning. It has excellent
dimensional accuracy, impact resistance and low distortion. Besides,
our open cassette raw material is Super Engineering grade polymer
with high performance properties such as high chemical resistance,
heat resistance and dimensional stability, and it is suitable for the
process environment of wafer manufacturer that requires heat
resistance.

●Specification

(Wafer storage quantity) : 25sheets

(Width) : 332mm
(Length) : 310mm
(Height) : 303mm
(Weight) : Empty - 2.2kg
With wafer - 5.2kg

●Product Compatibility

Secure compatibility of facility based on SEMI (E15.1,
E62, E63, E64, E110, E83, E84, E85, E99, E144) SPEC.

Soil purification	Plant purification
Purification by food chain in soil	Plant absorbs nutrition salts(N.P) by
Absorption and filtration	Plant’s root supplies oxygen and restores aperture
Aggregatization by small creature in soil	Prevents erosion of topsoil by plant

 

Processing efficiency	Maintenance	Economic efficiency
Purification using soil Improvement of low temperature processing by organic materials decomposition heat Groundwater pollution control by insulating layer	Simple facility Simple to process sediment Non-power operation Unattended operation	Low purchasing price for site (terrace land of the river, unused land can be used) Low costs of construction (simple facility) Short period of construction Low costs of maintenance (non-power)